Semiconductor Plants and electronics-related industry

● Related Application
From crystal growth and slicing in its early stage to the sophisti-cated wafer process, semiconductor manufacturing demands large amount of pure water for photo-masking, circuit-etching and CMP grinding. As the demand for precision increases, integrated circuits have advanced into nano domain, and as a result, the required purity of treatment water is escalating. Currently, the primary requirements for the quality of pure water for a 12'' wafer plant are as follows:
  Resistivity           >18.2MΩ-cm
  Total Organic Carbon (TOC)<0.5ppb
  Silicon Dioxide    >0.1ppb
  Metal                  <20ppt
  Boron                 <50ppt
  Particles             >0.05um
                            <0.2pcs/c.c.
The design of a pure water system shall be taken into consideration of not only the quality, stability for extended operation and simplicity of operation, but also savings on electricity and water consump-tions.
● Related Technologies
● Filtration 
● Ion-exchange
● Ultra-filtration / Reverse Osmosis 
● Degas Membrane /Continuous Electrodeionization
● UV Sterilization 
● Chemical Injection 
● Related Industries
ASE GROUP ZHONGLI FACTORY, PSI, HJT, SHT, GREATEK ELECTRONICS INC., RUIXIN SCIENCE, MXIC, PPT HUKOU FACTORY, SPIL-CS, SPIL-CHA, TSEC, VIS PLANT II, EEPV, SPIL-DFB, AIMCORE HUKOU FACTORY, USI, AIMCORE TAICHUNG FACTORY, AMKOR-T3, ZHEN DING TECH., MOTECH PLANT V, SPIL-SUZHOU FACTORY, KINIK, AMKOR-T1, AIMCORE, GREATEK ELECTRONICS INC. PLANT II, SPIL-CHA-BUILDING C-PH2, GREEN CRYSTAL, AUO LONGTAN, SPIL-DFB-BUILDING B, FCFT, AUO, WINTEK-VIETNAM Q FACTORY, MILDEX, WINTEK-VIETNAM(S), WINTEK-TAICHUNG, UTECH SOLAR, BIG SUN, MOTECH- FACTORY VI, SPIL-CHA-PH4, SAMSUNG-SUZHOU, SPIL-CHA-PH3, GREEN ENERGY TECHNOLOGY, SCIENTECH, SPIL-CSP-PH11, LEXTER, UNIMICRON TECHNOLOGY CORP., CENTURY EPITECH, MOTECH-SUZHOU, LITTELFUSE WUXI, FCFT TAIWAN, AMKOR-SHANGHAI, VIS , SPIL-CHW-PH 2B, SPIL-CHANGHUE, SINONAR, KINK, TAIWAN SEMICON, SPIL-SUZHOU, KINIK HUKOU, WINTEK, PITC-SHANGHAI, RITEK-VIETNAM, PKLT, MERCK DISPLAY LCCD, TSMC-F14, UNIMICRON,