Semiconductor-grade Chemical Plants

● Related Application
Ultrapure water that meets the process specification is crucial to the mixing of chemical solutions and the cleaning process in semiconductor-grade chemical plants. Therefore, pure water production and treatment units are considered Critical Equipment in the production flow of such plants.
For the purpose of quality assurance, pure water is classified into four grades, i.e. E1, E2, E3 andE4, according to ASTM standards.
● Related Technologies
● Depending on the feed water quality, either 2-pass RO or RO+EDI system is utilized.
● The design and construction of pipeline for the final-stage pure water circulation sys-tem are in com-pliance with the PVDF Specifi-cations.
● Related Industries